JPS4991241A - - Google Patents

Info

Publication number
JPS4991241A
JPS4991241A JP48140449A JP14044973A JPS4991241A JP S4991241 A JPS4991241 A JP S4991241A JP 48140449 A JP48140449 A JP 48140449A JP 14044973 A JP14044973 A JP 14044973A JP S4991241 A JPS4991241 A JP S4991241A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48140449A
Other languages
Japanese (ja)
Other versions
JPS5623163B2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4991241A publication Critical patent/JPS4991241A/ja
Publication of JPS5623163B2 publication Critical patent/JPS5623163B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback
    • G05D3/14Control of position or direction using feedback using an analogue comparing device
    • G05D3/1409Control of position or direction using feedback using an analogue comparing device with DC amplifier chain
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback
    • G05D3/14Control of position or direction using feedback using an analogue comparing device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Control Of Position Or Direction (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Automatic Focus Adjustment (AREA)
  • Lasers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14044973A 1972-12-18 1973-12-18 Expired JPS5623163B2 (en])

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1841272A CH561445A5 (en]) 1972-12-18 1972-12-18

Publications (2)

Publication Number Publication Date
JPS4991241A true JPS4991241A (en]) 1974-08-31
JPS5623163B2 JPS5623163B2 (en]) 1981-05-29

Family

ID=4432808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14044973A Expired JPS5623163B2 (en]) 1972-12-18 1973-12-18

Country Status (5)

Country Link
US (1) US3881107A (en])
JP (1) JPS5623163B2 (en])
CH (1) CH561445A5 (en])
DE (1) DE2362289C2 (en])
GB (1) GB1413698A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01183621A (ja) * 1988-01-18 1989-07-21 Olympus Optical Co Ltd 集光位置調節装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190829A (en]) * 1975-02-07 1976-08-09
US4161652A (en) * 1976-12-24 1979-07-17 Office National D'etudes Et De Recherches Aerospatiales System for optically aiming a laser beam on to a target
US4349732A (en) * 1980-01-07 1982-09-14 The Singer Company Laser spatial stabilization transmission system
US4355859A (en) * 1980-09-29 1982-10-26 Xerox Corporation Field replaceable laser apparatus for raster scanner
US4600185A (en) * 1983-09-01 1986-07-15 Moll Richard J Apparatus for detecting and actuating the feeding of paper in paper folding machines
US4679935A (en) * 1983-10-28 1987-07-14 Honda Giken Kogyo Kabushikikaisha Light distribution of headlight beam
IL81364A (en) * 1987-01-23 1990-08-31 Yaacov Sadeh Electro optically corrected coordinate measuring machine
US4889425A (en) * 1987-11-02 1989-12-26 The Boeing Company Laser alignment system
FR2631711B1 (fr) * 1988-05-19 1992-03-06 Mensi Sarl Appareil pour realiser le balayage d'un faisceau lumineux dans un plan parallele a un axe donne
US8094299B2 (en) * 2008-07-24 2012-01-10 Beckman Coulter, Inc. Transducer module

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1178971A (en) * 1965-06-15 1970-01-28 Nat Res Dev Alignment of Adjustable Parts of a Structure
US3558231A (en) * 1967-10-03 1971-01-26 Gen Electric Machine zero locator
US3696248A (en) * 1970-08-26 1972-10-03 Martin Marietta Corp Laser tracking method and apparatus
US3764220A (en) * 1971-07-30 1973-10-09 Nasa Alignment apparatus using a laser having a gravitationally sensitive cavity reflector
US3752589A (en) * 1971-10-26 1973-08-14 M Kobayashi Method and apparatus for positioning patterns of a photographic mask on the surface of a wafer on the basis of backside patterns of the wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01183621A (ja) * 1988-01-18 1989-07-21 Olympus Optical Co Ltd 集光位置調節装置

Also Published As

Publication number Publication date
GB1413698A (en) 1975-11-12
DE2362289A1 (de) 1974-06-20
CH561445A5 (en]) 1975-04-30
DE2362289C2 (de) 1983-10-20
US3881107A (en) 1975-04-29
JPS5623163B2 (en]) 1981-05-29

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